Turn any SEM into a non-contact optical 3D metrology device

Scanning electron microscopes (SEM) use a focused beam of electrons to scan surfaces and generate quality images of sample materials and components. By integrating your digital imaging SEM with MeX, a standalone software package, you can turn it into a true surface metrology device for detailed optical inspection and testing. 

Alicona MeX uses stereoscopic images to automatically retrieve 3D information and presents a highly accurate, robust and dense 3D dataset. Once generated the 3D dataset can be used to perform a reliable and traceable metrology examination of the component. 

Thanks to MeX, the SEM magnification is irrelevant and non-contact measurements can be taken on a macro and micro level without the need for any additional hardware. Measure height and roughness to EN ISO 4287/4288 standards, understand the volume of voids and protrusions and analyse area measurements with unrivalled detail. 

Featuring an AutoCalibration routine, MeX will automatically refine data for traceable 3D measurements. Turn any SEM into a non-contact optical 3D metrology device with Alicona MeX.